Special Issue on Semiconductor Factory Automation, Part 1: System-Level Automation

Journal article

Peer reviewed

MuDer Jeng, Mengchu Zhou and Thomas WEN-YAO

IEEE robotics & automation magazine, Vol.11(1), pp.3-3

01/03/2004

Abstract

Applied sciences

Computer science; control theory; systems

Control theory. Systems

Electronics

Exact sciences and technology

Microelectronic fabrication (materials and surfaces technology)

Robotics

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Special Issue on Semiconductor Factory Automation, Part 1: System-Level Automation
Creators - without role: MuDer Jeng - National Taiwan Ocean University
Mengchu Zhou - New Jersey Institute of Technology
Thomas WEN-YAO - Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, Province of China
Publication Details: IEEE robotics & automation magazine, Vol.11(1), pp.3-3
Publisher: Institute of Electrical and Electronics Engineers
Identifiers: 9940695008331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Journal article