Abstract
Research and development of nano/micro-sized objects and systems have received considerable interest in the last few decades and were accelerated in the last decade due to the emergence of nanotechnology. Compliant mechanisms have made an enormous contribution in the design process of various fields such as for adaptive structures, hand-held tools, components in transportations, electronics, and surgical tools, respectively. The use of compliant mechanisms will help reducing the number of components, which therefore decrease manufacturing cost and additionally increase the performance. Topology optimization has proven to be a powerful method for the conceptual design of structures and mechanisms. Topology optimization is the technique that finds the optimal layout of the structure within a specified design domain. This paper presents the angular compliant mechanism of a micro/nano table which can realize a planer angular movement of the objects. The topology optimization is applied for designing two-dimensional micro/nano table angular compliant mechanism. The optimization algorithm is implemented using interface between Matlab and ANSYS. The final optimal topology configuration of the micro/nano angular table is shown and discussed.