Structure of ion-beam-deposited B-C-N-O films and the role of oxygen

Journal article

Peer reviewed

X.-A Zhao, C. W Ong, Y. M NG, K. F Chan, Y. C Tsang, C. L Choy, P. W Chan and R. W. M Kwok

Journal of materials science letters, Vol.16(23), pp.1910-1913

1997

Abstract

Condensed matter: structure, mechanical and thermal properties

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Ion and electron beam-assisted deposition; ion plating

Materials science

Methods of deposition of films and coatings; film growth and epitaxy

Physics

Structure and morphology; thickness

Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)

Thin film structure and morphology

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Title: Structure of ion-beam-deposited B-C-N-O films and the role of oxygen
Creators - without role: X.-A Zhao - Hong Kong Polytechnic University
C. W Ong - Hong Kong Polytechnic University
Y. M NG - Hong Kong Polytechnic University
K. F Chan - Hong Kong Polytechnic University
Y. C Tsang - Hong Kong Polytechnic University
C. L Choy - Hong Kong Polytechnic University
P. W Chan - Hong Kong Polytechnic University
R. W. M Kwok - Chinese University of Hong Kong
Publication Details: Journal of materials science letters, Vol.16(23), pp.1910-1913
Publisher: Kluwer Academic Publishers
Identifiers: 9943920408331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article