Study of Al diffusion in GaN during metal organic vapor phase epitaxy of AlGaN/GaN and AlN/GaN structures

N. Chaaben; J. Laifi; H. Bouazizi; C. Saidi; A. Bchetnia; B. El Jani

doi:10.1016/j.mssp.2015.11.008

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Study of Al diffusion in GaN during metal organic vapor phase epitaxy of AlGaN/GaN and AlN/GaN structures

Journal article

Peer reviewed

Study of Al diffusion in GaN during metal organic vapor phase epitaxy of AlGaN/GaN and AlN/GaN structures

N. Chaaben, J. Laifi, H. Bouazizi, C. Saidi, A. Bchetnia and B. El Jani

Materials science in semiconductor processing, Vol.42, pp.359-363

01/02/2016

DOI: https://doi.org/10.1016/j.mssp.2015.11.008

Abstract

Engineering

Engineering, Electrical & Electronic

Materials Science

Materials Science, Multidisciplinary

Physical Sciences

Physics

Physics, Applied

Physics, Condensed Matter

Science & Technology

Technology

AlxGa1-xN/GaN hetero-structures were grown on SiN-treated (00.1) sapphire substrate by atmospheric pressure metalorganic vapor phase epitaxy (AP-MOVPE). Characterization of the grown structures was performed in-situ by laser reflectometry and ex-situ by secondary ion mass spectrometry (SIMS) measurements. Al SIMS profile showed some tailing to GaN layers which is associated to Al diffusion. The trimethylaluminium (TMA) effects on the growth rate, Al composition and Al diffusion coefficient were discussed. Al diffusion coefficients (D-Al) into GaN were calculated. The results suggest that Al diffuses faster near the AlN/GaN interface. (C) 2015 Elsevier Ltd. All rights reserved.

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Title: Study of Al diffusion in GaN during metal organic vapor phase epitaxy of AlGaN/GaN and AlN/GaN structures
Creators - without role: N. Chaaben - University of Monastir
J. Laifi - University of Monastir
H. Bouazizi - University of Monastir
C. Saidi - University of Monastir
A. Bchetnia - University of Monastir
B. El Jani - University of Monastir
Publication Details: Materials science in semiconductor processing, Vol.42, pp.359-363
Publisher: Elsevier
Number of pages: 5
Grant note: ARUBE program of DGRST
Identifiers: 9913065108331
Academic Unit: Al Jouf University; Qassim University
Language: English
Resource Type: Journal article