Abstract
This paper reports the effect of the substrate temperature of sprayed In2S3 material on the sensing response to ethanol. Glass substrates have been the supports of In2S3 thin films elaborated by spray pyrolysis technique. The growth has been made at a substrate temperature in the range 300-500 degrees C and the S/In molar ratio was set to 2. The morphology and microstructure of the obtained layers were depicted by X-ray diffraction (XRD), energy-dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM) and Raman spectroscopy. Ethanol vapor dynamic response was evaluated at a working temperature ranging from 250 to 400 degrees C by DC electrical characterization. The best response towards ethanol is obtained for the film deposited at 380 degrees C substrate temperature. Moreover, the oxygen adsorption heats of films were also evaluated.