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Surface Accumulation of Ion-Implanted Tin in GaAs After Laser Annealing
Journal article

Surface Accumulation of Ion-Implanted Tin in GaAs After Laser Annealing

M Badawi, B Sealy and K Stephens
J. Phys. D (Appl. Phys.), Vol.15(3), pp.507-513
14/03/1982

Abstract

A Rutherford back-scattering study of ion-implanted Sn in GaAs has been performed before and after irradiation with single pulses from a Q-switched ruby laser. Both indiffusion and segregation of tin to the surface occurred, the amount being dependent on the laser energy density and whether the beam was multimode or homogenised.--AA.

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