Abstract
In the present work, we have deposited calcium doped zinc oxide (CZO) thin films by magnetron sputtering technique based nanocrystalline particles elaborated by sol-gel method. The nanoparticles were synthesized by sol-gel method using supercritical drying in ethyl alcohol. The structural studied by X-ray diffractometry indicates that calcium-doped zinc oxide has a polycrystalline hexagonal wurzite structure. Transmission electron microscopy (TEM) measurements have shown that very small particles of CZO are present in the aerogel powder. The transmittance of the ZnO:Ca films in the visible range was over 80%. The lowest resistivity for the films was about 5 x 10(-3) Omega cm. (C) 2017 Published by Elsevier B.V.