The Fabrication and Preservation of Nanostructures on Silicon Wafers With a Native Oxide Layer

Journal article

Peer reviewed

Jen-Ching Huang and Jui-Yang Wang

Scanning, Vol.34(5), pp.347-356

09/2012

PMID: 22331793

Abstract

81.07

atomic force microscopy (AFM)

electrostatic patch preservation (EPP) method

nano-oxidation lithography

native oxide layer (NOL)

PACS: 81.16.Nd

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Title: The Fabrication and Preservation of Nanostructures on Silicon Wafers With a Native Oxide Layer
Creators - without role: Jen-Ching Huang - Tungnan University
Jui-Yang Wang - Tungnan University
Publication Details: Scanning, Vol.34(5), pp.347-356
Publisher: Blackwell Publishing Ltd
Number of pages: 10
Identifiers: 9945998508331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article