Abstract
An experimental study has been performed on MIS solar cells with Be, Cr and layered Cr-Be electrodes on single crystal Si, Wacker and Monsanto poly-Si substrates. Electrical characterization in the dark and under illumination was correlated to X-ray and Auger spectroscopy results. It was found that the electrode deposition rate directly affects the oxygen content of the electrodes for all metal-substrate configurations. This oxygen is believed to originate from the deposition ambient as well as from the SiO2 layer. In the case of cells with Cr and layered Cr-Be electrodes oxygen acts to reduce the electrode work function (thus increasing the open-circuit voltage) in direct proportion to the relative content of oxygen to chromium. (Author)