Abstract
Highly c-oriented La1.85Sr0.15CuO4 (LSCO) films were successfully deposited on SrTi03 (STO) substrates by on-axis magnetron sputtering. By using the standard four-probe technique and X-ray diffraction (XRD), we investigated the influence of film thickness on the structure and superconductivity of LSCO( x = 0.15) films. The experiment results show that the full-width at half maximum (FWHM) of the (006) rocking curve decreases with increasing film thickness, which indicates that the crystal qualities of films are improved. Meanwhile, the superconducting transition temperature is higher for the thicker films.