The reaction of ion-beam mixed titanium layers on silicon induced by electron beam heating

Journal article

Peer reviewed

F Mahmood, V. K Raman, R. A Mcmahon, H Ahmed, C Jeynes and D Sarkar

Semiconductor science and technology, Vol.4(11), pp.897-903

01/11/1989

Abstract

Analysing. Testing. Standards

Applied sciences

Condensed matter: structure, mechanical and thermal properties

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Measurement of properties and materials state

Metals, semimetals and alloys

Metals. Metallurgy

Nondestructive testing

Physics

Solid surfaces and solid-solid interfaces

Specific materials

Surface structure and topography

Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)

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Title: The reaction of ion-beam mixed titanium layers on silicon induced by electron beam heating
Creators - without role: F Mahmood - University of Cambridge
V. K Raman - University of Cambridge
R. A Mcmahon - University of Cambridge
H Ahmed - University of Cambridge
C Jeynes - University of Cambridge
D Sarkar - University of Cambridge
Publication Details: Semiconductor science and technology, Vol.4(11), pp.897-903
Publisher: Institute of Physics
Identifiers: 9943991708331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article