Abstract
The effects of nonreactive sputter gas (argon) flow rates on the surface properties of zirconium are investigated in argon-nitrogen admixture (60 sccm) using dc plasma enhanced hot filament nitriding (PEHFN) technique. The nitrided specimens are analyzed using X-ray diffractometry (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and nano hardness tester to study their surface properties. Phase analysis (XRD) confirms the development of o-Zr3N4 phase for all exposure conditions. Crystallite size analysis using XRD and AFM morphology confirms the growth of nanostructured zirconium nitride layers. Considerable enhancement in hardness is found when the sample is treated for 40 sccm argon in the admixture Ar:N-2 (60 sccm).