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The surface properties of sputtered amorphous silicon thin films
Journal article   Peer reviewed

The surface properties of sputtered amorphous silicon thin films

M. S Aida and R Bachiri
Journal of non-crystalline solids, Vol.189(1-2), pp.167-172
01/08/1995

Abstract

Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science; rheology Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Surface conductivity and carrier phenomena

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