Thermal annealing effects on a representative high-k/metal film stack

Journal article

Peer reviewed

M. M Hussain, M. A QUEVEDO-LOPEZ, H. N Alshareef, H. C Wen, D Larison, B Gnade and M EL-BOUANANI

Semiconductor science and technology, Vol.21(10), pp.1437-1440

01/10/2006

Abstract

Applied sciences

Design. Technologies. Operation analysis. Testing

Electronics

Exact sciences and technology

General (including economical and industrial fields)

Integrated circuits

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Thermal annealing effects on a representative high-k/metal film stack
Creators - without role: M. M Hussain - Sematech
M. A QUEVEDO-LOPEZ - Sematech
H. N Alshareef - Texas Instruments
H. C Wen - Sematech
D Larison - Advanced Technology Development Facility (ATDF), Austin, TX, United States
B Gnade - The University of Texas at Dallas
M EL-BOUANANI - Department of Materials Science and Engineering, University of North Texas, United States
Publication Details: Semiconductor science and technology, Vol.21(10), pp.1437-1440
Publisher: Institute of Physics
Identifiers: 9943596108331
Academic Unit: King Saud University
Language: English
Resource Type: Journal article