Abstract
In this paper, we report on microstructural, optical and electrical properties of alternating multilayer of vanadium pentoxide (V
2
O
5
), 25 nm, and vanadium (V), 5 nm, thin films deposited at room temperature by radio frequency (RF) and DC magnetron sputtering, respectively. Raman and photoluminescence (PL) spectroscopy have been employed to investigate the effects of thermal annealing for 20, 30 and 40 min at 400[Formula: see text]C in Nitrogen (N
2
) atmosphere on the multiple phase formation and its impact on the film resistance and temperature coefficient of resistance (TCR). We demonstrate that the oxygen free annealing environment allows the formation of multiple phases including V
2
O
5
, V
6
O[Formula: see text] and VO
2
through oxygen diffusion and consequent deficiency in V
2
O
5
layer.