- Title
- Thermal stability and dielectric properties of ultrathin CaZrOx films prepared by pulsed laser deposition
- Creators - without role
- X. Y Qiu - Chinese Academy of SciencesH. W Liu - Nanjing UniversityF Fang - Chinese Academy of SciencesM. J HA - Chinese Academy of SciencesX. H Zhou - Chinese Academy of SciencesJ.-M Liu - Nanjing University
- Publication Details
- Applied physics. A, Materials science & processing, Vol.81(7), pp.1431-1434
- Publisher
- Springer
- Identifiers
- 9945851108331
- Academic Unit
- King Abdullah University of Science & Technology
- Language
- English
- Resource Type
- Journal article
Journal article
Thermal stability and dielectric properties of ultrathin CaZrOx films prepared by pulsed laser deposition
Applied physics. A, Materials science & processing, Vol.81(7), pp.1431-1434
01/11/2005
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