Abstract
In this work, we present reliability results of MIM (Metal-Insulator-Metal) capacitors fabricated with parylene as the dielectric, deposited at room temperature. We have evaluated the time dependent dielectric breakdown (TDDB) of parylene-based MIM capacitors as a function of constant DC voltage stress, area and dielectric thickness of the capacitor. Mean-time-to-failure (MTTF) of parylene evaluated at different stress voltages shows a power law distribution over the applied voltage range and device area, with MTTF driven by the number of defects. Defect density in the parylene capacitors is also reported and is calculated to be similar to 1.2 x 10(3) defects/cm(2). (C) 2009 Elsevier B.V. All rights reserved.