Trench Etches in Silicon with Controllable Sidewall Angles

Journal article

Peer reviewed

Robert N. Carlile, Victor C. Liang, Olgierd A. Palusinski and Mithkal M. Smadi

Journal of the Electrochemical Society, Vol.135(8), pp.2058-2064

01/08/1988

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Title: Trench Etches in Silicon with Controllable Sidewall Angles
Creators - without role: Robert N. Carlile - University of Arizona
Victor C. Liang - University of Arizona
Olgierd A. Palusinski - University of Arizona
Mithkal M. Smadi - University of Arizona
Publication Details: Journal of the Electrochemical Society, Vol.135(8), pp.2058-2064
Identifiers: 9931956308331
Academic Unit: University Ha'il
Language: English
Resource Type: Journal article