UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements

M. Lanza; M. Porti; M. Nafria; X. Aymerich; E. Whittaker; B. Hamilton

doi:10.1016/j.microrel.2010.07.049

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UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements

Journal article

Peer reviewed

UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements

M. Lanza, M. Porti, M. Nafria, X. Aymerich, E. Whittaker and B. Hamilton

Microelectronics and reliability, Vol.50(9-11), pp.1312-1315

01/09/2010

DOI: https://doi.org/10.1016/j.microrel.2010.07.049

Abstract

Engineering

Engineering, Electrical & Electronic

Nanoscience & Nanotechnology

Physical Sciences

Physics

Physics, Applied

Science & Technology

Science & Technology - Other Topics

Technology

In this work, a Conductive Atomic Force Microscopy (CAFM) working in contact mode has been used to compare the measured electrical properties and breakdown (BD) on ultra thin high-k dielectrics, when different environmental conditions are used. In particular, the effect of the environment on the conductivity measurements, the lateral resolution in current images and the lateral propagation of the BD event will be analyzed in air, dry nitrogen (N(2)) and Ultra High Vacuum (UHV). (C) 2010 Elsevier Ltd. All rights reserved.

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Title: UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements
Creators - without role: M. Lanza - Universitat Autònoma de Barcelona
M. Porti - Universitat Autònoma de Barcelona
M. Nafria - Universitat Autònoma de Barcelona
X. Aymerich - Universitat Autònoma de Barcelona
E. Whittaker - University of Manchester
B. Hamilton - University of Manchester
Publication Details: Microelectronics and reliability, Vol.50(9-11), pp.1312-1315
Publisher: Elsevier
Number of pages: 4
Identifiers: 9945161408331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article