Abstract
The SnO
/Si heterojunction possesses a large band offset and it is easy to control the transportation of carriers in the SnO
/Si heterojunction to realize high-response broadband detection. Therefore, we investigated the potential of the SnO
nanoparticle thin film/SiO
/p-Si heterojunction for photodetectors. It is demonstrated that this heterojunction shows a stable, repeatable and broadband photoresponse from 365 nm to 980 nm. Meanwhile, the responsivity of the device approaches a high value in the range of 0.285-0.355 A W
with the outstanding detectivity of ∼2.66 × 10
cm H
W
and excellent sensitivity of ∼1.8 × 10
cm
W
, and its response and recovery times are extremely short (<0.1 s). This performance makes the device stand out among previously reported oxide or oxide/Si based photodetectors. In fact, the photosensitivity and detectivity of this heterojunction are an order of magnitude higher than that of 2D material based heterojunctions such as (Bi
Te
)/Si and MoS
/graphene (photosensitivity of 7.5 × 10
cm
W
and detectivity of ∼2.5 × 10
cm H
W
). The excellent device performance is attributed to the large Fermi energy difference between the SnO
nanoparticle thin film and Si, SnO
nanostructure, oxygen vacancy defects and thin SiO
layer. Consequently, practical highly-responsive broadband PDs may be actualized in the future.