Understanding of CO2 interaction with thermally grown SiO2 on Si using IBA depth profiling techniques

Geetanjali Deokar; Marie D'Angelo; Emrick Briand; Catherine Deville Cavellin

doi:10.1016/j.nimb.2013.04.002

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Understanding of CO2 interaction with thermally grown SiO2 on Si using IBA depth profiling techniques

Journal article

Peer reviewed

Understanding of CO2 interaction with thermally grown SiO2 on Si using IBA depth profiling techniques

Geetanjali Deokar, Marie D'Angelo, Emrick Briand and Catherine Deville Cavellin

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, Vol.304(1), pp.67-71

01/06/2013

DOI: https://doi.org/10.1016/j.nimb.2013.04.002

Abstract

Instruments & Instrumentation

Nuclear Science & Technology

Physical Sciences

Physics

Physics, Atomic, Molecular & Chemical

Physics, Nuclear

Science & Technology

Technology

Interactions between CO2 and SiO2 films thermally grown on Si have been studied using O-18 and C-13 as isotopic tracers associated with ion beam analysis (IBA) depth profiling techniques. From secondary ion mass spectrometry (SIMS) measurements no carbon from CO2 is detected in the silica while it is found in Si. These results suggest that CO2 diffuses through the silica. Exchanges of oxygen between CO2 and silica can be observed from O-18 to O-16 SIMS signals variation. The oxygen concentration depth profiles were determined quantitatively using the narrow resonance near 151 keV in the O-18(p,alpha)N-15 nuclear reaction (Narrow Resonance Profiling, NRP). We demonstrate that two distinct oxygen exchanges processes coexist and we determine the diffusion coefficient of the CO2 molecule in the silica at 1100 degrees C. (C) 2013 Elsevier B.V. All rights reserved.

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Title: Understanding of CO2 interaction with thermally grown SiO2 on Si using IBA depth profiling techniques
Creators - without role: Geetanjali Deokar - Institut des NanoSciences de Paris
Marie D'Angelo - UPMC, INSP, CNRS UMR 7588, F-75005 Paris, France
Emrick Briand - Institut des NanoSciences de Paris
Catherine Deville Cavellin - Institut des NanoSciences de Paris
Publication Details: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, Vol.304(1), pp.67-71
Publisher: Elsevier
Number of pages: 5
Identifiers: 9944246008331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article