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Virtual production lines design for back-end semiconductor manufacturing systems
Journal article   Peer reviewed

Virtual production lines design for back-end semiconductor manufacturing systems

Ying Tang, MengChu Zhou and R Qiu
IEEE transactions on semiconductor manufacturing, Vol.16(3), pp.543-550
01/08/2003

Abstract

Algorithms Completion time Design engineering Dynamical systems Dynamics Management Production lines Semiconductors
This paper introduces the virtual production line (VPL) concept, which initiates a new method to model the shop floor from both control and management point of view. Heuristic algorithms are presented to dynamically configure a large system into many VPLs, which ensure the line balance and efficiency, and accurately predicate the completion time for each work-order. The proposed methodology and algorithms are demonstrated through a simplified back-end semiconductor manufacturing system.

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