Abstract
We demonstrate the wavelength tuning and the control of its temperature dependence in 850 nm GaAs vertical cavity surface emitting lasers (VCSELs) using a thermally and electrostatically actuated cantilever structure. The temperature dependence can be controlled from +0.035 to -0.14 nm/K by changing the length of a micromachined cantilever, which can be electrostatically actuated for wavelength tuning. Continuous wavelength tuning over 36 nm was obtained keeping almost constant temperature dependence. The result indicates a possibility of realizing widely-tunable VCSELs with engineered temperature dependence. (C) 2014 The Japan Society of Applied Physics