Abstract
The multilayer of ZnO/Cu/ZnO was prepared by Rf sputtering. X-ray photoelectron spectroscopy analysis has been performed to study the chemical states of the core level atoms. Inter layer diffusion has an importance in the multilayer structure for different applications such as conductivity so we studied the possibility of diffusion of interlayer of the Cu(I). Evidence for the presence of Cu(II) oxidation state has been obtained from the shakeup satellite structure of Cu2(p) core level atoms. The deconvolution of O 1(s) was found to associate with the C bond. The chemical state of Zn2p was performed to study the bonding of Zn-O core level atoms.