Abstract
The authors present a detailed x-ray dynamical diffraction analysis of metamorphic InxGa1-xAs/InyGa1-yAs superlattices grown epitaxially on GaAs (001) substrates. The x-ray rocking curve analysis was conducted for a number of hkl reflection profiles, including 004, 115, 026, and 117, assuming Cu k alpha(1) radiation, by using the mosaic crystal model for dynamical diffraction. The authors show that the threading dislocation density in the superlattice can be estimated from nondestructive x-ray rocking curve measurements, by observing the superlattice peak widths. (C) 2017 American Vacuum Society.