Abstract
This paper presents a MEMS enabled frequency selective surface for 60 GHz applications. The transmission through the FSS can be switched by 30 dB at resonance frequency by switching MEMS between ON and OFF states. Beside other applications, this FSS can be used as a free space amplitude shift keying modulator. The FSS model is based on rectangular loop aperture geometry, with each unit cell having two MEMS contact type switches across the aperture at 180 degree interval. Due to rectangular orientation of FSS, it can operate only for one polarization i.e. either TE or TM depending on the orientation of the incident electric field. The bias line of the MEMS switches is placed under the top conductor separated by a thin layer of silicon nitride. This helps to simplify the fabrication as only single sided patterning is necessary. Positive dc biasing is provided from the biasing to the electrode of the MEMS switches when the MEMS cantilever beams are connected to ground through the outer conductor of the FSS structure. Preliminary theoretical results are described.